Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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02/17/2009
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Application #:
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11647867
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Filing Dt:
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12/29/2006
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Publication #:
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Pub Dt:
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08/23/2007
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Inventors:
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Thomas N. Horsky, Dale C. Jacobson
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Title:
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ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 34 SULLIVAN ROAD, UNIT #21 |
| BILLERICA, MASSACHUSETTS 01862 |
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| JOHN S. PANIAGUAS |
| 525 WEST MONROE STREET |
| CHICAGO, ILLINOIS 60661 |
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Assignment:
2
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| 2304 CRANBORNE ROAD |
| MIDLOTHIAN, VIRGINIA 23113 |
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| DEBORAH WING C/O KATTEN MUCHIN ROSENMAN |
| 525 WEST MONROE STREET |
| CHICAGO, IL 60661 |
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Assignment:
3
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RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
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| 34 SULLIVAN ROAD |
| NORTH BILLERICA, MASSACHUSETTS 01862 |
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| DEBORAH WING C/O KATTEN MUCHIN ROSENMAN |
| 525 WEST MONROE ST. |
| CHICAGO, IL 60661 |
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Assignment:
4
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 34 SULLIVAN ROAD |
| NORTH BILLERICA, MASSACHUSETTS 01862-2000 |
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| JOHN S. PANIAGUAS |
| 2900 K STREET, NW |
| SUITE 200 |
| WASHINGTON, DC 20007-5118 |
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