Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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01/15/2013
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Application #:
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11673065
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Filing Dt:
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02/09/2007
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Publication #:
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Pub Dt:
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08/23/2007
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Inventors:
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Wataru Nagatomo, Atsushi Miyamoto, Hidetoshi Morokuma
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Title:
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METHOD AND APPARATUS FOR MONITORING CROSS-SECTIONAL SHAPE OF A PATTERN FORMED ON A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHISHINBASHI, 1-CHOME, |
| MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS |
| 1300 N. SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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Assignment:
2
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CORRECTED ASSIGNMENT TO CORRECTLY LIST INVENTORS AND APPLICATION SERIAL NUMBER PREVIOUSLY RECORDED AT REEL 019222, FRAME 0441.
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| 24-14, NISHISHINBASHI, MINATO-KU |
| TOKYO 105-8717, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET - SUITE 1800 |
| ARLINGTON, VA 22209 |
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Assignment:
3
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CHANGE OF NAME AND ADDRESS
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| 17-1, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MATTINGLY & MALUR PC |
| 1800 DIAGONAL ROAD |
| SUITE 210 |
| ALEXANDRIA, VA 22314 |
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