Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11706557
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Filing Dt:
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02/13/2007
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Publication #:
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Pub Dt:
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09/06/2007
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Inventors:
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Takayuki Toshima, Kinya Ueno, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino et al
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Title:
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Substrate processing apparatus for resist film removal
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN |
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| DAVID L. FEHRMAN |
| MORRISON & FOERSTER LLP |
| 555 WEST FIFTH STREET |
| LOS ANGELES, CA 90013-1024 |
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