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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11508544
Filing Dt:
08/23/2006
Publication #:
Pub Dt:
09/06/2007
Inventors:
Thomas Nowak, Kang Sub Yim, Sum-Yee Betty Tang, Kwangduk Douglas Lee et al
Title:
Enhancement of remote plasma source clean for dielectric films
Assignment: 1
Reel/Frame:
018216/0935Recorded: 08/23/2006Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/27/2006
Exec Dt:
07/25/2006
Exec Dt:
08/03/2006
Exec Dt:
07/24/2006
Exec Dt:
07/24/2006
Exec Dt:
07/24/2006
Exec Dt:
08/03/2006
Exec Dt:
07/28/2006
Exec Dt:
07/25/2006
Exec Dt:
07/24/2006
Exec Dt:
08/09/2006
Exec Dt:
07/27/2006
Exec Dt:
08/10/2006
Assignee:
P.O. BOX 450-A
PATENT COUNSEL
SANTA CLARA, CALIFORNIA 95052
Correspondent:
PATTERSON & SHERIDAN, L.L.P.
APPLIED MATERIALS INC
3040 POST OAK BOULEVARD, SUITE 1500
HOUSTON, TX 77056

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