Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11747698
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Filing Dt:
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05/11/2007
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Publication #:
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Pub Dt:
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09/06/2007
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Inventors:
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Akio KOIKE, Yasutomi Iwahashi, Naoki Sugimoto, Noriaki Shimodaira, Shinya Kikugawa
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Title:
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PROCESS FOR PRODUCING SILICA GLASS CONTAINING TIO2, AND OPTICAL MATERIAL FOR EUV LITHOGRAPHY EMPLOYING SILICA GLASS CONTAINING TIO2
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 12-1, YURAKUCHO 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8405 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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