Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11568204
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Filing Dt:
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01/31/2007
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Publication #:
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Pub Dt:
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09/20/2007
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Inventors:
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Wolfgang Singer, Johannes Wangler
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Title:
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Illumination System for a Microlithographic Projection Exposure Apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| 225 FRANKLIN STREET |
| BOSTON, MA 02110 |
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