Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11509736
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Filing Dt:
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08/25/2006
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Publication #:
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Pub Dt:
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09/20/2007
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Inventors:
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Kenichi Kuwabara, Satoshi Une, Tomoyoshi Ichimaru, Masamichi Sakaguchi, Naoki Yasui
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Title:
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Dry etching method including overetching using a carbon-containing etch gas
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-24-14, NISHI SHIMBASHI, MINATO-KU |
| TOKYO 105-8717, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET - SUITE 1800 |
| ARLINGTON, VA 22209 |
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