Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11690315
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Filing Dt:
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03/23/2007
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Publication #:
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Pub Dt:
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09/27/2007
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Inventor:
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Yoshio GOTO
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Title:
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Illumination apparatus with birefringent waveplate, exposure apparatus having the same, and device manufacturing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2 SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN 146-8501 |
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| MORGAN & FINNEGAN LLP |
| 3 WORLD FINANCIAL CENTER |
| NEW YORK, NY 10281-2101 |
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