Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/14/2009
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Application #:
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11392026
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Filing Dt:
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03/29/2006
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Publication #:
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Pub Dt:
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10/04/2007
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Inventor:
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Bassam Shamoun
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Title:
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RF POWERED TARGET FOR INCREASING DEPOSITION UNIFORMITY IN SPUTTERING SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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