Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11410698
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Filing Dt:
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04/24/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Inventors:
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Alexander Paterson, Valentin N. Todorow, Brian K. Hatcher, Dan Katz et al
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Title:
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Dual plasma source process using a variable frequency capacitively coupled source for controlling ion radial distribution
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPT., M/S 2061-LEGAL |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| ROBERT M. WALLACE |
| LAW OFFICE ROBERT M. WALLACE |
| 2112 EASTMAN AVENUE, SUITE 102 |
| VENTURA, CA 93003 |
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