Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11413900
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Filing Dt:
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04/28/2006
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Publication #:
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Pub Dt:
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11/01/2007
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Inventors:
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Kallol Bera, Xiaoye Zhao, Kenny L. Doan, Ezra Robert Gold, Bruno Geoffrion, Bryan Pu et al
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Title:
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Plasma etch process using polymerizing etch gases and an inert diluent gas in independent gas injection zones to improve etch profile or etch rate uniformity
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 540A |
| LEGAL AFFAIRS DEPT., M/S 2061-LEGAL |
| SANTA CLARA, CALIFORNIA 95052 |
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| ROBERT M. WALLACE |
| LAW OFFICE OF ROBERT M. WALLACE |
| 2112 EASTMAN AVENUE, SUITE 102 |
| VENTURA, CALIFORNIA 93003 |
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