Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/21/2011
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Application #:
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11658034
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Filing Dt:
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02/27/2007
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Publication #:
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Pub Dt:
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11/08/2007
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Inventor:
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Tsuneyuki Hagiwara
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Title:
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IMAGE PLANE MEASUREMENT METHOD, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| MARIN A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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