Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11647230
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Filing Dt:
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12/29/2006
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Publication #:
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Pub Dt:
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11/15/2007
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Inventors:
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Sung Koo Lee, Jae Chang Jung
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Title:
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Method for manufacturing semiconductor device using immersion lithography process with filtered air
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SAN 136-1, AMI-RI, BUBAL-EUP |
| ICHEON-SI, GYEONGGI-DO 467-701, KOREA, REPUBLIC OF |
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| JOHNNY A. KUMAR |
| HELLER EHRMAN LLP |
| 1717 RHODE ISLAND AVENUE, N.W. |
| WASHINGTON, D.C. 20036 |
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