Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11661871
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Filing Dt:
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03/02/2007
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Publication #:
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Pub Dt:
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11/22/2007
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Inventor:
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Kazumasa Wakiya
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Title:
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Immersion Liquid for Liquid Immersion Lithography Process and Method for Forming Resist Pattern Using Such Immersion Liquid
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 150, NAKAMARUKO, NAKAHARA-KU, KAWASAKI-SHI |
| KANAGAWA, JAPAN 211-0012 |
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| DAVID B. RITCHIE |
| THELEN REID BROWN RAYSMAN & STEINER, LLP |
| P.O. BOX 640640 |
| SAN JOSE, CA 95164 |
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