Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11662771
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Filing Dt:
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03/13/2007
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Publication #:
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Pub Dt:
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12/13/2007
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Inventor:
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Nam Hun Kim
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Title:
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Adaptively Plasma Source And Method Of Processing Semiconductor Wafer Using The Same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 352-1 ICHI-RI, MAJANG-MYEON, ICHEON-SI |
| GYEONGGI-DO 467-813, KOREA, REPUBLIC OF |
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| MORGAN & FINNEGAN, L.L.P. |
| 3 WORLD FINANCIAL CENTER |
| NEW YORK, NY 10281-2101 |
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