Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/01/2011
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Application #:
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11892608
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Filing Dt:
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08/24/2007
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Publication #:
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Pub Dt:
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12/20/2007
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Inventor:
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Matthew McCarthy
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Title:
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METHOD AND APPARATUS FOR VARIABLE POLARIZATION CONTROL IN A LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| STERNE, KESSLER, GOLDSTEIN AND FOX PLLC |
| 1100 NEW YORK AVE. NW |
| WASHINGTON, DC 20005 |
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