Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11808960
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Filing Dt:
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06/14/2007
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Publication #:
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Pub Dt:
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12/20/2007
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Inventors:
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Masaki Ueno, Toshio Ueda, Takao Nakamura, Ken Takahashi, Osamu Yasaku, Kazuo Ujiie et al
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Title:
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Metal-organic vaporizing and feeding apparatus, metal-organic chemical vapor deposition apparatus, metal-organic chemical vapor deposition method, gas flow rate regulator, semiconductor manufacturing apparatus, and semiconductor manufacturing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-33, KITAHAMA 4-CHOME, CHUO-KU, OSAKA-SHI |
| OSAKA 541-0041, JAPAN |
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| 1-103-55, YOSHINODAI, KAWAGOE-SHI |
| SAITAMA 350-0833, JAPAN |
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| MCDERMOTT WILL & EMERY LLP |
| 600 13TH STREET, N.W. |
| WASHINGTON, D.C. 20005-3096 |
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