Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11831943
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Filing Dt:
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07/31/2007
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Publication #:
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Pub Dt:
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12/27/2007
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Inventors:
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ALFRED W. MAK, Yung-Hee Yvette Lee, Cynthia B. Brooks, Jian Ding, Melisa J. Buie et al
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Title:
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INTEGRATED PHASE ANGLE AND OPTICAL CRITICAL DIMENSION MEASUREMENT METROLOGY FOR FEED FORWARD AND FEEDBACK PROCESS CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KEITH TABOADA, ESQ. |
| 595 SHREWSBURY AVENUE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
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