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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/01/2011
Application #:
11757151
Filing Dt:
06/01/2007
Publication #:
Pub Dt:
12/27/2007
Inventors:
Takahisa OTSUKA, Tsuyoshi Shibata
Title:
SUBSTRATE PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
019371/0027Recorded: 06/01/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/24/2007
Exec Dt:
05/24/2007
Assignee:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-8481
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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