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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/11/2011
Application #:
11427324
Filing Dt:
06/28/2006
Publication #:
Pub Dt:
01/03/2008
Inventors:
Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Derek R. Wtty, Chiu Chan, Sohyun Park et al
Title:
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSITY AND STEP COVERAGE
Assignment: 1
Reel/Frame:
018133/0270Recorded: 08/17/2006Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/27/2006
Exec Dt:
07/31/2006
Exec Dt:
07/27/2006
Exec Dt:
08/03/2006
Exec Dt:
07/28/2006
Exec Dt:
08/01/2006
Exec Dt:
07/28/2006
Exec Dt:
07/28/2006
Exec Dt:
08/03/2006
Exec Dt:
07/31/2006
Exec Dt:
08/03/2006
Exec Dt:
08/03/2006
Assignee:
P. O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS
P.O. BOX 450A
SANTA CLARA, CA 95052

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