Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/02/2013
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Application #:
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11587099
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Filing Dt:
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08/01/2007
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Publication #:
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Pub Dt:
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01/17/2008
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Inventors:
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Mitsuru Kobayashi, Masahiko Yasuda
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Title:
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MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE METHOD, AND EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| STAAS & HALSEY LLP |
| ATTENTION: PAUL I. KRAVETZ |
| 1201 NEW YORK AVE., N.W., 7TH FLOOR |
| WASHINGTON, D.C. 20005 |
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