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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/06/2010
Application #:
11490924
Filing Dt:
07/21/2006
Publication #:
Pub Dt:
01/24/2008
Inventors:
Allen B. Gardiner, Seongtae Jeong, Marie T. Conte, Manish Chandhok, Chris Kenyon
Title:
MEASUREMENT OF A SCATTERED LIGHT POINT SPREAD FUNCTION (PSF) FOR MICROELECTRONIC PHOTOLITHOGRAPHY
Assignment: 1
Reel/Frame:
023974/0510Recorded: 02/12/2010Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/22/2006
Exec Dt:
06/22/2006
Exec Dt:
06/22/2006
Exec Dt:
06/22/2006
Exec Dt:
06/22/2006
Assignee:
2200 MISSION COLLEGE BOULEVARD
SANTA CLARA, CALIFORNIA 95052
Correspondent:
BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP
1279 OAKMEAD PARKWAY
SUNNYVALE, CA 94085

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