Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11778058
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Filing Dt:
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07/15/2007
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Publication #:
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Pub Dt:
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01/31/2008
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Inventors:
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Gerardo A. Delgadino, Chang-Lin Hsieh, Yan Ye, Hyunjong Shim
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Title:
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DIELECTRIC ETCH TOOL CONFIGURED FOR HIGH DENSITY AND LOW BOMBARDMENT ENERGY PLASMA PROVIDING HIGH ETCH RATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CALIFORNIA 95052 |
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ROBERT W. MULCAHY |
P.O. BOX 450A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CA 95052 |
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