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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7878145
Issue Dt:
02/01/2011
Application #:
10858582
Filing Dt:
06/02/2004
Publication #:
20080026133
Pub Dt:
01/31/2008
Inventors:
Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Daniel Distaso, Jay T. Scheuer et al
Title:
MONITORING PLASMA ION IMPLANTATION SYSTEMS FOR FAULT DETECTION AND PROCESS CONTROL
Assignment: 1
Reel/Frame:
014075/0859Recorded: 10/24/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
DURRE, MARKUS
Exec Dt:
10/15/2003
Assignee:
FREUDENBERG-NOK GENERAL PARTNERSHIP
47690 EAST ANCHOR COURT
PLYMOUTH, MICHIGAN 48170-2455
Correspondent:
FREUDENBERG-NOK GENERAL PARTNERSHIP
INTELLECTUAL PROPERTY DEPT.
47690 EAST ANCHOR COURT
PLYMOUTH, MI 48170-2455
Assignment: 2
Reel/Frame:
015419/0123Recorded: 06/02/2004Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
FANG, ZIWEI
Exec Dt:
05/26/2004
KO, SUNG-CHEON
Exec Dt:
05/26/2004
WINDER, EDMUND J.
Exec Dt:
05/25/2004
DISTASO, DANIEL
Exec Dt:
05/25/2004
GODET, LUDOVIC
Exec Dt:
05/26/2004
KOO, BON WOONG
Exec Dt:
05/25/2004
SCHEUER, JAY T.
Exec Dt:
05/25/2004
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
WOLF, GREENFIELD & SACKS, P.C.
WILLIAM R. MCCLELLAN
FEDERAL RESERVE PLAZA
600 ATLANTIC AVENUE
BOSTON, MA 02210

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