Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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10/28/2008
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Application #:
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11502729
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Filing Dt:
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08/11/2006
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Publication #:
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Pub Dt:
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02/14/2008
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Inventors:
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Michael Clarke, Robert F. McLoughlin, Marc Laverdiere
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Title:
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SYSTEMS AND METHODS FOR FLUID FLOW CONTROL IN AN IMMERSION LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3500 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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| SPRINKLE IP LAW GROUP |
| 1301 W. 25TH STREET |
| SUITE 408 |
| AUSTIN, TX 78705 |
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Assignment:
2
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| 90 SO. 7TH STREET |
| 19TH FLOOR |
| MINNEAPOLIS, MINNESOTA 55479 |
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| SARAH WITHERS |
| 3290 NORTHSIDE PARKWAY |
| SUITE 400 |
| ATLANTA, GA 30327 |
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Assignment:
3
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| 129 CONCORD ROAD |
| BILLERICA, MASSACHUSETTS 01821-4600 |
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| SPRINKLE IP LAW GROUP |
| 1301 W. 25TH STREET |
| SUITE 408 |
| AUSTIN, TX 78705 |
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Assignment:
4
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RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
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| 129 CONCORD ROAD |
| BILLERICA, MASSACHUSETTS 01821-4600 |
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| TIMOTHY J. KING |
| 129 CONCORD ROAD |
| ENTEGRIS, INC. |
| BILLERICA, MA 01821-4600 |
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