Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/14/2010
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Application #:
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11504388
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Filing Dt:
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08/15/2006
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Publication #:
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Pub Dt:
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02/21/2008
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Inventors:
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Chandrasekhar Sarma, Jingyu Lian, Matthias Lipinski, Haoren Zhuang
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Title:
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METROLOGY SYSTEMS AND METHODS FOR LITHOGRAPHY PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1730 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95112 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| MUNICH, GERMANY 81669 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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