Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/14/2010
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Application #:
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11892949
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Filing Dt:
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08/28/2007
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Publication #:
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Pub Dt:
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03/06/2008
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Inventors:
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Takehiko Fujita, Jun Ogawa, Shigeru Nakajima, Kazuhide Hasebe
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Title:
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OXIDATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| SMITH, GAMBRELL & RUSSELL |
| 1130 CONNECTICUT AVENUE, N.W. |
| SUITE 1130 |
| WASHINGTON, D.C. 20036 |
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