Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11512124
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Filing Dt:
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08/30/2006
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Publication #:
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Pub Dt:
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03/20/2008
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Inventors:
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Michiaki Kobayashi, Tsutomu Nakamura, Akitaka Makino
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Title:
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Plasma processing apparatus capable of adjusting pressure within processing chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHISHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET - SUITE 1800 |
| ARLINGTON, VIRGINIA 22209 |
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