Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11693642
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
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03/20/2008
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Inventor:
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Y. Sean Lin
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Title:
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METHOD AND APPARATUS FOR DISPENSE OF CHEMICAL VAPOR IN A TRACK LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| K-I SHIJO BUILDING, 88 KANOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU |
| SHIMOGYO-KU, KYOTO 600-8009, JAPAN |
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| JOHN J. FARRELL |
| TOWNSEND AND TOWNSEND AND CREW LLP |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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