Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11876680
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Filing Dt:
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10/22/2007
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Publication #:
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Pub Dt:
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03/27/2008
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Inventors:
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Nagarajan Rajagopalan, Meiyee Shek, Kegang Huang, Bok Heon Kim, Hichem M'saad et al
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Title:
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REDUCTION OF HILLOCKS PRIOR TO DIELECTRIC BARRIER DEPOSITION IN CU DAMASCENE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| EUGENE J. BERNARD |
| TOWNSEND AND TOWNSEND AND CREW LLP |
| TWO EMBARCADERO CENTER - 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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