Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/05/2011
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Application #:
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11793322
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Filing Dt:
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01/07/2008
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Publication #:
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Pub Dt:
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04/17/2008
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Inventors:
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Nicolas Benoit, Torsten Feigl, Norbert Kaiser, Sergiy Yulin
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Title:
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THERMALLY STABLE MULTILAYER MIRROR FOR THE EUV SPECTRAL REGION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HANSASTRASSE 27C |
| MUNICH, GERMANY 80686 |
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| COHEN, PONTANI, LIEBERMAN & PAVANE |
| 551 FIFTH AVENUE |
| SUITE 1210 |
| NEW YORK, NY 10176 |
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