Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11544051
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Filing Dt:
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10/06/2006
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Publication #:
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Pub Dt:
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05/01/2008
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Inventors:
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Makoto Ando, Takuichi Hirano, Yukihiko Nakata, Kazufumi Azuma, Masashi Goto et al
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Title:
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PLASMA PROCESSING APPARATUS AND MICROWAVE ANTENNA CONFIGURATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-12-1, OOKAYAMA |
| MEGURO-KU, TOKYO 152-8550, JAPAN |
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| 292, YOSHIDA-CHO, TOTSUKA-KU, YOKOHAMA-SHI |
| KANAGAWA 244-0817, JAPAN |
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| C. IRVIN MCCLELLAND |
| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-12-1 OOKAYAMA |
| MEGURO-KU |
| TOKYO, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND MAIER & NEUSTA |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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