Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11923583
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Filing Dt:
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10/24/2007
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Publication #:
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Pub Dt:
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05/01/2008
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Inventors:
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Dien-Yeh Wu, Puneet Bajaj, Xiaoxiong Yuan, Steven H. Kim, Schubert S. Chu, Paul F. Ma et al
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Title:
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VORTEX CHAMBER LIDS FOR ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATTERSON & SHERIDAN, LLP |
| 3040 POST OAK BOULEVARD, SUITE 1500 |
| HOUSTON, TX 77056 |
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