Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/04/2008
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Application #:
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11536978
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Filing Dt:
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09/29/2006
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Publication #:
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Pub Dt:
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05/01/2008
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Inventors:
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Heiko Weichert, Kirsten Ruck
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Title:
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METHOD FOR IN-LINE MONITORING AND CONTROLLING IN HEAT-TREATING OF RESIST COATED WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TBS BROADCAST CENTER |
| TOKYO, JAPAN 107 |
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| KRISTI L. DAVIDSON |
| 441 VINE STREET |
| 2700 CAREW TOWER |
| CINCINNATI, OH 45202 |
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