Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11907409
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Filing Dt:
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10/11/2007
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Publication #:
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Pub Dt:
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05/08/2008
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Inventors:
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Ken Nakao, Hitoshi Kato, Tsuneyuki Okabe, Mitsuhiro Okada, Manabu Honma, Tomoki Haneishi
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Title:
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Gas supply system, gas supply method, method of cleaning thin film forming apparatus, thin film forming method and thin film forming apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO-TO, JAPAN |
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| MICHAEL A. MAKUCH |
| SMITH, GAMBRELL & RUSSELL, LLP |
| 1130 CONNECTICUT AVENUE - SUITE 1130 |
| WASHINGTON, DC 20036 |
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