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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11972899
Filing Dt:
01/11/2008
Publication #:
Pub Dt:
05/15/2008
Inventor:
Michael Sogard
Title:
AUTOFOCUS METHODS AND DEVICES FOR LITHOGRAPHY
Assignment: 1
Reel/Frame:
020356/0914Recorded: 01/11/2008Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
02/17/2005
Assignee:
2-3 MARUNOUCHI, 3-CHOME, CHIYODA-KU
TOKYO, JAPAN 100-8331
Correspondent:
BEYER WEAVER LLP
PO BOX 70250
OAKLAND, CA 94612-0250

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