Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/28/2012
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Application #:
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11979776
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Filing Dt:
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11/08/2007
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Publication #:
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Pub Dt:
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05/15/2008
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Inventors:
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Yu-Sin Yang, Chung-Sam Jun, Jong-An Kim, Moon-Shik Kang, Ji-Hye Kim
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Title:
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METHOD OF DETECTING DEFECTS IN PATTERNS ON SEMICONDUCTOR SUBSTRATE BY COMPARING SECOND IMAGE WITH REFERENCE IMAGE AFTER ACQUIRING SECOND IMAGE FROM FIRST IMAGE AND APPARATUS FOR PERFORMING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 8910 |
| RESTON, VA 20195 |
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