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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
11/01/2011
Application #:
11970062
Filing Dt:
01/07/2008
Publication #:
Pub Dt:
06/05/2008
Inventors:
Vaidyanathan BALASUBRAMANIAM, Koichiro INAZAWA, Arpan P. MAHOROWALA, Siddhartha PANDA et al
Title:
METHOD AND APPARATUS FOR MULTILAYER PHOTORESIST DRY DEVELOPMENT
Assignment: 1
Reel/Frame:
025574/0272Recorded: 01/03/2011Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/02/2003
Exec Dt:
09/02/2003
Assignee:
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondent:
MELODY HILLMAN
4350 W. CHANDLER BLVD., SUITE 10
CHANDLER, AZ 85226
Assignment: 2
Reel/Frame:
025574/0387Recorded: 01/03/2011Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/04/2003
Exec Dt:
12/08/2003
Exec Dt:
12/03/2003
Assignee:
NEW ORCHARD ROAD
ARMONK, NEW YORK 10504
Correspondent:
MELODY HILLMAN
4350 W. CHANDLER BLVD., SUITE 10
CHANDLER, AZ 85226

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