Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11904374
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Filing Dt:
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09/27/2007
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Publication #:
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Pub Dt:
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07/03/2008
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Inventors:
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Keita Kitade, Osamu Matsushita, Takashi Fujita, Toshiyuki Yokoyama
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Title:
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End point detection method applying resonance phenomenon, end point detection apparatus, chemical mechanical polishing apparatus on which the detection apparatus is loaded, and semiconductor device fabricated by the chemical mechanical polishing apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9-7-1, SHIMORENJAKU |
| MITAKA-SHI, TOKYO, JAPAN |
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| PAUL A. FATTIBENE |
| FATTIBENE AND FATTIBENE |
| 2480 POST ROAD |
| SOUTHPORT, CONNECTICUT 06890 |
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