Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11623739
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Filing Dt:
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01/16/2007
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Publication #:
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Pub Dt:
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07/17/2008
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Inventors:
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Richard J. Hertel, You Chia Li, Philip J. McGrail JR., Timothy J. Miller et al
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Title:
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Plasma Source with Liner for Reducing Metal Contamination
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| KURT RAUSCHENBACH |
| P.O. BOX 387 |
| BEDFORD, MA 01730 |
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