Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11989319
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Filing Dt:
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02/13/2008
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Publication #:
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Pub Dt:
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07/17/2008
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Inventors:
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Takahiro Fujii, Seiji Itani, Motozo Kurita, Yukihito Tashiro
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Title:
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Vacuum Processing Apparatus, Method for Manufacturing Semiconductor Device, and System For Manufacturing Semiconductor Device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-1, KURIGI 2-CHOME, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA-KEN, JAPAN |
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| BUCHANAN, INGERSOLL & ROONEY PC |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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