Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/28/2011
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Application #:
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11733984
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Filing Dt:
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04/11/2007
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Publication #:
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Pub Dt:
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07/31/2008
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Inventors:
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KENNETH S. COLLINS, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger JR. et al
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Title:
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METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR WITH VARIABLE HEIGHT GROUND RETURN PATH TO CONTROL PLASMA ION DENSITY UNIFORMITY
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450-A |
LEGAL AFFAIRS DEPARTMENT |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
P.O. BOX 450-A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CA 95052 |
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