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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/08/2011
Application #:
11733767
Filing Dt:
04/11/2007
Publication #:
Pub Dt:
07/31/2008
Inventors:
Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger JR. et al
Title:
PLASMA PROCESS UNIFORMITY ACROSS A WAFER BY APPORTIONING GROUND RETURN PATH IMPEDANCES AMONG PLURAL VHF SOURCES
Assignment: 1
Reel/Frame:
019145/0710Recorded: 04/11/2007Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/16/2007
Exec Dt:
03/05/2007
Exec Dt:
03/16/2007
Exec Dt:
03/06/2007
Exec Dt:
03/05/2007
Exec Dt:
03/02/2007
Exec Dt:
03/05/2007
Exec Dt:
03/07/2007
Exec Dt:
03/05/2007
Exec Dt:
03/05/2007
Exec Dt:
03/05/2007
Exec Dt:
03/06/2007
Exec Dt:
03/16/2007
Exec Dt:
03/19/2007
Exec Dt:
03/05/2007
Exec Dt:
03/02/2007
Assignee:
P.O. BOX 450-A
LEGAL AFFAIRS DEPARTMENT
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
P.O. BOX 450-A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CA 95052

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