Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/22/2011
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Application #:
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11867972
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Filing Dt:
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10/05/2007
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Publication #:
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Pub Dt:
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08/28/2008
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Inventors:
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Daniel Fischer, Matthias Schaller, Matthias Lehr, Kornelia Dittmar
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Title:
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HIGH YIELD PLASMA ETCH PROCESS FOR INTERLAYER DIELECTRICS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 EAST BEN WHITE BOULEVARD |
| AUSTIN, TEXAS 78741 |
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| J. MIKE AMERSON |
| 10333 RICHMOND, SUITE 1100 |
| HOUSTON, TX 77042 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| 8110 GATEHOUSE RD. |
| SUITE 100 EAST |
| FALLS CHURCH, VA 22042 |
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