Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/02/2010
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Application #:
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11677973
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Filing Dt:
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02/22/2007
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Publication #:
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Pub Dt:
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08/28/2008
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Inventors:
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Akira Fujimura, Daisuke Hara, Katsuo Komuro, Takashi Mitsuhashi
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Title:
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METHOD AND SYSTEM FOR IMPROVEMENT OF DOSE CORRECTION FOR PARTICLE BEAM WRITERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2655 SEELY AVENUE |
| SAN JOSE, CALIFORNIA 95134 |
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| PETER C. MEI |
| BINGHAM MCCUTCHEN LLP |
| THREE EMBARCADERO CENTER |
| SAN FRANCISCO, CA 94111-4067 |
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