Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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12033915
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Filing Dt:
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02/20/2008
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Publication #:
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Pub Dt:
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08/28/2008
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Inventors:
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Binod B. De, Sanjay Malik, Raj Sakamuri, Chisun Hong
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Title:
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HIGH ETCH RESISTANT UNDERLAYER COMPOSITIONS FOR MULTILAYER LITHOGRAPHIC PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 80 CIRCUIT DRIVE |
| NORTH KINGSTOWN, RHODE ISLAND 02852 |
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| OHLANDT, GREELEY, RUGGIERO & PERLE, LLP |
| ONE LANDMARK SQUARE, 10TH FLOOR |
| STAMFORD, CT 06901 |
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