Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/05/2010
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Application #:
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11951807
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Filing Dt:
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12/06/2007
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Publication #:
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Pub Dt:
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09/04/2008
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Inventors:
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Masami Shibagaki, Kenji Numajiri, Akihiro Egami, Akira Kumagai, Susumu Akiyama
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Title:
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SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI |
| KANAGAWA-KEN, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3801 |
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