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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7830611
Issue Dt:
11/09/2010
Application #:
11971328
Filing Dt:
01/09/2008
Publication #:
20080239503
Pub Dt:
10/02/2008
Inventors:
Olaf Conradi, Boris Bittner, Sascha Bleidistel, Markus Hauf, Wolfgang Hummel, Arif Kazi et al
Title:
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
021112/0714Recorded: 06/18/2008Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CONRADI, OLAF
Exec Dt:
04/10/2008
BLEIDISTEL, SASCHA
Exec Dt:
04/27/2008
HAUF, MARKUS
Exec Dt:
04/14/2008
HUMMEL, WOLFGANG
Exec Dt:
04/14/2008
KAZI, ARIF
Exec Dt:
04/07/2008
SCHWAER, BAERBEL
Exec Dt:
04/10/2008
WEBER, JOCHEN
Exec Dt:
04/15/2008
HOLDERER, HUBERT
Exec Dt:
04/30/2008
TAYEBATI, PAYAM
Exec Dt:
04/17/2008
BITTNER, BORIS
Exec Dt:
04/07/2008
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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