Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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10573406
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Filing Dt:
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03/27/2006
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Publication #:
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Pub Dt:
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10/09/2008
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Inventors:
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Koichi Watanabe, Yukinobu Suzuki, Takashi Ishigami
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Title:
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SPUTTERING TARGET AND PROCESS FOR PRODUCING SI OXIDE FILM THEREWITH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO 105-8001, JAPAN |
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| 8, SHINSUGITA-CHO, ISOGO-KU |
| YOKOHAMA-SHI, KANAGAWA 235-8522, JAPAN |
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| RICHARD L. SCHWAAB |
| FOLEY & LARDNER LLP |
| WASHINGTON HARBOUR |
| 3000 K STREET, NW, SUITE 500 |
| WASHINGTON, DC 20007-5143 |
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