Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11741121
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Filing Dt:
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04/27/2007
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Publication #:
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Pub Dt:
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10/30/2008
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Inventor:
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Harald Herchen
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Title:
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Method and System for Detecting Substrate Temperature in a Track Lithography Tool
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU |
| KYOTO, JAPAN 600-8009 |
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| JOHN K. SHIMMICK |
| TOWNSEND AND TOWNSEND AND CREW LLP |
| 2 EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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